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South Dakota State University |
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Homepage of Prof. Mahdi F. Baroughi |
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The advanced photovoltaic research group is well-equipped with variety of fabrication and characterization tools. Major fabrication tools include a multichamber physical vapor deposition (PVD) system, rapid thermal processor and two glove boxes. Characterization facility in the PV material and device characterization lab includes state of the art IV/CV and solar simulator, and spectral response measurement systems. The optics lab has been equipped with state of the art steady state and time resolved fluorescence spectrometer and a femto second fluorescence spectrometer for spectral engineering of sunlight. |
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Spectral response (quantum efficiency) measurement setup including a monochromator, Xe lamp, and Si and Ge detectors. |
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The PVD unit is equipped with RF and DC sputtering, e-beam evaporation, filament evaporation, and ion gun. |
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Cascade 10000 Probe station equipped with a microscope with a halogen lamp, Agilent 4155 semiconductor parameter analyzer (computer controlled), and HP 4192 impedance analyzer. This facility is used for current-voltage-temperature-temperature and impedance-voltage-frequency measurements. |
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Physical Vapor Deposition System (Torr International) |
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Spectral response measurement system, Newport |
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Probe station, Agilent 4155 and HP 4192 |
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Lab Gallery |


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Rapid thermal annealing system is a versatile tool for crystallization of hydrogenated Si thin films, hydrogenation of electronic materials (wafers and thin films), growth of ultra thin oxides, annealing of samples, diffusion of dopants, and annealing of contacts. |
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Rapid Thermal Processor (RTP-600S) |

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Coming up. This system will enable us to develop semiconductors and dielectric materials for photovoltaics, optics, MEMS, and nanotechnology applications.
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Large area plasma enhanced chemical vapor deposition system |