Research Facilities
Cleanroom
- 1800 Sq Ft class 1000 clean room
Thin Film Deposition Systems
- IABD system
- Ion beam assisted deposition
- E-beam evaporation (4 sources)
- Thermal evaporation (two sources)
- Sputter deposition (DC & RF)
- Low temperature deposition (77 K)
- Multi Source PVD System
- Sputter deposition (RF & DC)
- Thermal Evaporation
- Rapid thermal oxidation
- CVC Evaporator
- Thermal evaporation (up to three sources)
- CRC-150
- Sputter deposition (RF & DC)
Thin Film Processing
- Rapid Thermal Processing system (up to 1200 C, for 6" wafers)
- Tube oven (up to 1000 C, for 2" wafers)
- UV Lithography (for miron size features)
- Electron Beam lithography (for nm size features)
PV Materials Characterization
- IQE (Newport)
- IV/CV (Agilent 4155C)
- 6" Cascade probestation
- Hall Measurement
- UV-Vis spectroscopy (Agilent)
Optical Characterization
- Ultrafast time resolved spectroscopy (Tsunami)
- UV-Vis spectroscopy (Agilent)
- Edinburgh Steady State Fluorescence Spectrometer FS920: The FS920 fluorimeter is a modular system for acquiring steady state excitation and emission spectra in the UV-visible spectral range and NIR spectral range with single photon counting sensitivity at room temperature. The spectrometer use Xe900 450W steady state xenon arc lamp (ozone free) as light source. The excitation wavelength can change from 200 to 900 nm. The instrument is equipped two detectors (Hamamatsu R928P from 200-870 nm, and Hamamatsu G8605-23 from 900 nm-1670 nm) for UV-VIS and NIR region measurements, respectively. All measurements were controlled by software F900.
- Edinburgh Life Time Spectrometer: LifeSpec II Spectrometer: The LifeSpec II spectrometer is a compact, high performance system to be used with picoseconds diode lasers, utilizing the technique of Time Correlated Single Photon Counting for the lifetime measurement at room temperature. The instrument also equipped two different detectors (Hamamatsu H5773-02 from 300 nm-870 nm and Hamamatsu H10330-75 from 950 nm-1700 nm) for UV-VIS and NIR region measurements, respectively. Three laser diodes with wavelengths at 375 nm, 475 nm, and 635 nm are available. The instrument has the capability to measure lifetime from several hundreds picoseconds to several microseconds. The measurement is also controlled by software F900.
Nanofabrication & Characterization
- Electron Beam lithography
- AFM based Nanolithography
- Atomic force microscopy
- Scanning tunneling microscope
- Scanning electron Microscopy
Gas Sensing
- Gas delivery system
- Electrometer with atto-Amp sensitivity
- Gas sensor characterization system